Note: An improved low-frequency correction technique for piezoelectric force sensors in high-speed nanopositioning systems

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Note: An improved low-frequency correction technique for piezoelectric force sensors in high-speed nanopositioning systems.

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ژورنال

عنوان ژورنال: Review of Scientific Instruments

سال: 2017

ISSN: 0034-6748,1089-7623

DOI: 10.1063/1.4981530