Note: An improved low-frequency correction technique for piezoelectric force sensors in high-speed nanopositioning systems
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چکیده
منابع مشابه
Note: An improved low-frequency correction technique for piezoelectric force sensors in high-speed nanopositioning systems.
Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2017
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4981530